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EUV's Underdog Light Source Will Have Its Day

Discharge-produced plasma might beat its laser-based competitors

3 min read
EUV's Underdog Light Source Will Have Its Day


Photo: ASML Holding
EUV Endgame: ASML's NXE3100 weighs in at 50 metric tons, contains more than a million parts, and will set you back a cool €60 million. It is set to start printing chips soon.

Extreme ultraviolet lithography, the key process in making the finely featured chips of the coming decade, has had a long list of detractors, but its time seems to be at hand. The proof? ASML Holding, the Dutch company that makes most of the world's chip lithography tools, has sold six of its monstrous EUVL machines to six separate customers, including foundry behemoth Taiwan Semiconductor Manufacturing Co. These chipmakers will use ASML's NXE3100 to print the tiniest features of the most critical layers on their future chips.

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The Transistor at 75

The past, present, and future of the modern world’s most important invention

2 min read
A photo of a birthday cake with 75 written on it.
Lisa Sheehan

Seventy-five years is a long time. It’s so long that most of us don’t remember a time before the transistor, and long enough for many engineers to have devoted entire careers to its use and development. In honor of this most important of technological achievements, this issue’s package of articles explores the transistor’s historical journey and potential future.

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