Large-scale flexible
electronics are similar in some respects to
the active-matrix LCDs found nowadays on virtually every
laptop computer, PDA, and cellphone. Like those
displays, many types of flexible electronics are much
larger than conventional ICs, and they are not built on
silicon. The main difference is that the conventional
displays are built on brittle, rigid glass plates, while
flexible circuits are built on thin, pliable sheets of
plastic. Transistors that can bend along with the
plastic would have to be very thin—just a fraction of a
micrometer. On silicon chips, it isn't the transistors
themselves that are inflexible, it's the relatively
thick silicon wafer in which the transistors are
fabricated.
Two basic alternative materials have the potential to
make thin transistors on flexible substrates: amorphous
silicon (the technology used in the Samsung display
mentioned above) and organic polymers. To understand how
the flexible circuits are made, first consider the
standard lithography-based process that creates ICs, of
both the silicon and plastic varieties.
In logic ICs, transistors act like switches. A voltage
on a terminal called the gate turns the transistor on,
allowing charge to flow in a "channel" between the other
two terminals, which are called the source and the
drain. Removing the voltage stops the flow.
As with silicon ICs, large-scale flexible electronics
are built up layer by layer. First, the plastic
substrate is uniformly coated with a film of the
material—either amorphous silicon or an organic
polymer—that will form the sources, drains, and
channels of the transistors. That layer is covered with
a layer of insulation, which is covered in turn by a
layer of metal or semiconductor to form the gate. The
material on top of this three-layer sandwich is covered
with a photosensitive material, or photoresist, which is
exposed to a pattern of light that represents the gates
in the flexible circuit. Areas of photoresist exposed to
the light become soluble. The unexposed regions remain insoluble.
If more than one circuit is to be built on a single
substrate, a movable stage that holds the substrate
shifts it to a new site, which is exposed to the light
pattern next. For conventional silicon ICs, hundreds of
chips, each about a square centimeter, are typically
made on a single silicon wafer. But because large-scale
flexible circuits can be tens of centimeters on a side,
a single flexible substrate will usually hold fewer than
10 of them—and, for very large circuits, perhaps just one.
After all of the circuit sites have been exposed, the
soluble photoresist is rinsed off, leaving a pattern
where the gates are to be located. An etching process
takes away all of the gate material not covered by
photoresist, leaving the gate pattern. The remaining
unexposed photoresist is removed next, exposing the
uniform layers of insulator and semiconductor into which
the sources and drains will go, along with the gates.
The same basic expose-and-etch process is repeated
several times with different patterns of light: first to
remove the insulation where the source and drain
contacts will go, then to pattern the semiconductor into
individual transistors, and finally to create the wires
that connect the transistors into circuits.
There are several important differences between this
process for making flexible circuits and the one used to
make silicon ICs. In the first case, the sources,
drains, and channels sit on top of the flexible
substrate. But in silicon chips, they are built right
into the silicon wafer. For flexible electronics, the
gate insulation is deposited onto the flexible
substrate, then etched to shape. For silicon wafers,
silicon dioxide is used to insulate the gate; it is
grown by exposing the silicon wafer to oxygen.
A third important difference is that silicon wafers
undergo several heating steps that reduce the resistance
of the transistors so they will switch faster. During
these steps, temperatures can exceed 1000 ÂșC. Such heat
could melt plastic.
In theory, at least, plastic circuits can be made more
cheaply than conventional silicon ICs because the
circuits and manufacturing processes are simpler. For
example, to get a good yield of working chips,
conventional semiconductor plants must essentially rid
the air of particles down to sizes of only a few
nanometers—about the dimensions of a virus. But because
the transistors in flexible electronic circuits are much
larger—up to 25 m as opposed to 0.1 m—the allowable
particle size is also much larger, which makes the
air-filtration task a lot easier and cheaper. Also, an
IC can have more than 30 layers of patterned material;
flexible circuits—for example, in a flexible
display—would typically have only about 10. These
differences, however, bring the costs down by perhaps 80
percent, but not to the factor-of-10 reduction that
analysts say is needed to make plastic circuits
ubiquitous. The tradeoff, of course, is slower circuitry.